| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f55ab25d06422137ee78c3e4bdc4edf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q80-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q80-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-00 |
| filingDate |
2007-03-26^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-05-24^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec1cb94189dc2dcdea385653b34f9823 |
| publicationDate |
2011-05-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7947952-B1 |
| titleOfInvention |
Nanomachining method and apparatus |
| abstract |
Methods and apparatus are disclosed for nanomachining operations. Excitation energy settings are provided to minimize machine induced scan cutting. Cut operations can be operated in a feedback mode to provide controlled cutting operations. Measurement and sweep techniques to facilitate nanomachining operations are disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011275280-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10107833-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018143220-A1 |
| priorityDate |
2001-03-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |