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filingDate 2011-02-11^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2012-05-01^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2012-05-01^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8168488-B2
titleOfInvention Systems and methods for reducing contact to gate shorts
abstract A method for reducing contact to gate shorts in a semiconductor device and the resulting semiconductor device are described. In one embodiment, a gate is formed on a substrate, a contact is formed on the gate and the substrate, and an insulator is formed between the gate and the contact. The insulator may be formed by oxidizing the gate to form a dielectric between the contact and the gate after the contact is formed on the gate.
priorityDate 2006-12-21^^<http://www.w3.org/2001/XMLSchema#date>
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