| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d79a3714d75520adeea100b7ed428a77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2b95252bd721206a4e80a9d4e5c7ad9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-868
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-864 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-425 |
| filingDate |
2010-03-01^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-09-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f956fea8548b66b60b9b10242498360 |
| publicationDate |
2012-09-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8263484-B2 |
| titleOfInvention |
High resistivity silicon wafer and method for manufacturing the same |
| abstract |
This method for manufacturing a high resistivity silicon wafer includes pulling a single crystal such that the single crystal has a p-type dopant concentration at which a wafer surface resistivity becomes in a range of 0.1 to 10 k Ωcm, an oxygen concentration Oi of 5.0×10 17 to 20×10 17 atoms/cm 3 (ASTM F-121, 1979), and a nitrogen concentration of 1.0×10 13 to 10×10 13 atoms/cm 3 (ASTM F-121, 1979) by using a Czochralski method, processing the single crystal into wafers by slicing the single crystal, and subjecting the wafer to an oxygen out-diffusion heat treatment process in a non-oxidizing atmosphere. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014363904-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2689787-C2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015294868-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9111883-B2 |
| priorityDate |
2009-03-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |