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filingDate 2011-04-28^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2013-08-20^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8513120-B2
titleOfInvention Gold-tin etch using combination of halogen plasma and wet etch
abstract The present disclosure relates to an implantable medical device. The implantable medical device includes a component comprising a first substrate bonded to a second substrate. A method for forming the component includes removing a first portion of tin (Sn) from gold tin (AuSn) through a halogen plasma. A first portion of gold (Au) is exposed in response to removing the first portion of the Sn. The first portion of the Au through a wet etch. A second portion of the Sn is exposed in response to removing the first portion of Au.
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