| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f35cd3dc2160d59ed6ef664fd1805471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eccd894c99fea2d1c0c8735872bb2309
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4dd109d764f689b2c78a76237aa7b8db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d27c2d06b81bb6e3c42ba3a6d327dc8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2003-08-08^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-09-24^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37866d9d62f94ab2faf6303e09aaf4f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81747bdc399d9f83d9920938aa2846f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ea173e832183ff5bcf50b0e2660d342 |
| publicationDate |
2013-09-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8540891-B2 |
| titleOfInvention |
Etching pastes for silicon surfaces and layers |
| abstract |
The invention relates to novel etching media in the form of etching pastes for etching selected areas or the entire area of silicon surfaces and layers, in addition to the use of said media. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014231704-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9355867-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9099582-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999186-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9305792-B2 |
| priorityDate |
2002-09-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |