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filingDate 2009-12-07^^<http://www.w3.org/2001/XMLSchema#date>
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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b57dd5d7db7334152898e813c6b9d07c
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publicationDate 2013-10-08^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8551850-B2
titleOfInvention Methods of forming a reversible resistance-switching metal-insulator-metal structure
abstract A method of forming a reversible resistance-switching metal-insulator-metal structure is provided, the method including forming a first non-metallic conducting layer, forming a non-conducting layer above the first non-metallic conducting layer, forming a second non-metallic conducting layer above the non-conducting layer, etching the first non-metallic conducting layer, non-conducting layer and second non-metallic conducting layer to form a pillar, and disposing a carbon material layer about a sidewall of the pillar. Other aspects are also provided.
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