| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0b859cea2a10606acc8665663844159
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_709f22cdef952244a0aa846eb7ff37ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_71f462c1d0cd40b9e43ceab07b8ab70d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-1241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12549 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1803
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-3455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1632 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C20-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C20-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-02 |
| filingDate |
2012-07-02^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-11-19^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8e9efecc9c0344bbc998aeafb25b79d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bec7e9424f9f52883d8ae2488a2ee86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b484ee6e864b3876aaa90834f86c24cb |
| publicationDate |
2013-11-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8586133-B2 |
| titleOfInvention |
Method for strengthening adhesion between dielectric layers formed adjacent to metal layers |
| abstract |
A method is provided which includes forming a metal layer and converting at least a portion of the metal layer to a hydrated metal oxide layer. Another method is provided which includes selectively depositing a dielectric layer upon another dielectric layer and selectively depositing a metal layer adjacent to the dielectric layer. Consequently, a microelectronic topography is formed which includes a metal feature and an adjacent dielectric portion comprising lower and upper layers of hydrophilic and hydrophobic material, respectively. A topography including a metal feature having a single layer with at least four elements lining a lower surface and sidewalls of the metal feature is also provided herein. The fluid/s used to form such a single layer may be analyzed by test equipment configured to measure the concentration of all four elements. In some cases, the composition of the fluid/s may be adjusted based upon the analysis. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011124191-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9627608-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9062378-B2 |
| priorityDate |
2003-06-16^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |