| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_295109133d3eb97361607c70f2210fe7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a85177812b5ec619bf1e37048407dd1c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-0072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3732 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-12 |
| filingDate |
2011-09-21^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-07-15^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_379fb2605ada63aeea885df041dc8c12 |
| publicationDate |
2014-07-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8777699-B2 |
| titleOfInvention |
Superabrasive tools having substantially leveled particle tips and associated methods |
| abstract |
Superabrasive tools and methods for making and using the same are provided. In one aspect, for example, a CMP pad dresser includes a first monolayer of superabrasive particles disposed on and coupled to one side of a metal support layer and a second monolayer of superabrasive particles disposed on and coupled to the metal support layer on an opposite side from the first monolayer. The superabrasive particles of the second monolayer are positioned to have substantially the same distribution as the superabrasive particles of the first monolayer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015306734-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9475169-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8974270-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013134574-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9616550-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012302146-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9724802-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9067301-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9409280-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9238207-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10307888-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016114465-A1 |
| priorityDate |
2010-09-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |