http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8808521-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1b24a830babcbe4291e0a4c3b5cf8d6f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-14 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-18 |
| filingDate | 2010-01-07^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-08-19^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a4ddd74f5cf81c8bf6bc38d50e24f29 |
| publicationDate | 2014-08-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8808521-B2 |
| titleOfInvention | Intelligent control system for electrochemical plating process |
| abstract | A method and system are disclosed for controlling plating bath compositions. Speciation analyzers including HPLC and mass spectrometry are employed to separate, detect, identify, and quantify additives and degradation products. A control unit is linked to a plating bath interface, analyzer interface, and valves to control the flow of plating bath to an analyzer sampler and back to plating bath. For each degradation product, a response output is determined for at least one performance factor in terms of an additive equivalent amount that produces the same effect. A data processing unit receives concentration data for additives and degradation products from speciation analyzers and calculates an amount of each additive needed to replenish a used bath. As a result, the bleed-and-feed ratio for maintaining plating baths can be substantially reduced with significant productivity improvement and cost savings in terms of chemicals, chemical disposal, less down time and improved product quality. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10590560-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11061382-B2 |
| priorityDate | 2010-01-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 43 of 43.