| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa8378842226cc0d87cd05c03cacd103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f5132a5f584c8e1e5928d899a8bc6578
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f9282f8bdcf87f1ec4013933c2e8022 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24495 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05 |
| filingDate |
2012-01-27^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-11-18^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e59e9b2403804376477b6a4422023663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d865d2d76ab340dadd63ff75a3e7f72e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_070b48ccd9f4983eb3af0d9daf130632 |
| publicationDate |
2014-11-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8890068-B2 |
| titleOfInvention |
Charged particle ray apparatus and pattern measurement method |
| abstract |
Provided is a technique to automatize a synthesis function of signal charged particles having different energies. A charged particle beam apparatus includes: a charged particle source configured to irradiate a sample with a primary charged particle ray; a first detector configured to detect a first signal electron having first energy from signal charged particles generated from the sample; a second detector configured to detect a second signal electron having second energy from signal charged particles generated from the sample; a first operation part configured to change a synthesis ratio of a signal intensity of the first signal electron and a signal intensity of the second signal electron and to generate a detected image corresponding to each synthesis ratio; a second operation part configured to calculate a ratio of signal intensities corresponding to predetermined two areas of the detected image generated for each synthesis ratio; and a third operation part configured to determine a mixture ratio to be used for acquisition of the detected image on a basis of a change of the ratio of signal intensities. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10643819-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10854419-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11120969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10186399-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10446359-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017301513-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9318299-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015102221-A1 |
| priorityDate |
2011-03-24^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |