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publicationDate 2014-12-23^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8916456-B2
titleOfInvention Group III-V substrate material with particular crystallographic features
abstract A substrate including a body comprising a Group III-V material and having an upper surface, the body comprising an offcut angle defined between the upper surface and a crystallographic reference plane, and the body further having an offcut angle variation of not greater than about 0.6 degrees.
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