| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249921
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0198
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-888 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 |
| filingDate |
2013-06-27^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-03-31^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78c2a988a04880468b2cd2581d346e65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e057f7278a1d3c50bff72712b37bfdb |
| publicationDate |
2015-03-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8993088-B2 |
| titleOfInvention |
Polymeric materials in self-assembled arrays and semiconductor structures comprising polymeric materials |
| abstract |
Methods for fabricating sublithographic, nanoscale microstructures in line arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. Semiconductor structures may include self-assembled block copolymer materials in the form of lines of half-cylinders of a minority block matrix of a majority block of the block copolymer. The lines of half-cylinders may be within trenches in the semiconductor structures. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10153200-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10049874-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9768021-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10138318-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11282741-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11680292-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11384392-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015137331-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11124829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11532477-B2 |
| priorityDate |
2008-05-02^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |