| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1ffd651f31c19e05801e9215a919c3f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5bdca878b60827974e45d2b2332f506f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf791b713a2e1e845ad27a99816a254d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c4025ba8a42a591664f05e28eea1c871
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_42188412d11a11a6ff7c07b39b899b70 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F283-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C25-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F283-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2011-01-19^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-04-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eacce048a20997c6e2f5aef27bc930cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd4ce37601f0b739c9efecdd8dc4d679
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ecdefab89bc020bef44d2b6fd10ff9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0609778610e5a1ad735acec062f18906
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acc2a730aab5e334e857a0b71ea568f0 |
| publicationDate |
2015-04-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9005472-B2 |
| titleOfInvention |
Aqueous polishing agent and graft copolymers and their use in a process for polishing patterned and unstructured metal surfaces |
| abstract |
An aqueous polishing agent, comprising, as the abrasive, at least one kind of polymer particles (A) finely dispersed in the aqueous phase and having at their surface a plurality of at least one kind of functional groups (a1) capable of interacting with the metals and/or the metal oxides on top of the surfaces to be polished and forming complexes with the said metals and metal cations, the said polymer particles (A) being preparable by the emulsion or suspension polymerization of at least one monomer containing at least one radically polymerizable double bond in the presence of at least one oligomer or polymer containing a plurality of functional groups (a1); graft copolymers preparable by the emulsion or suspension polymerization of at least one monomer containing at least one radically polymerizable double bond in the presence of at least one oligomeric or polymeric aminotriazine-polyamine condensate; and a process for the chemical and mechanical polishing of patterned and unstructured metal surfaces making use of the said aqueous polishing agent. |
| priorityDate |
2010-02-24^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |