| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae2900b856949831189024a025e31249
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a46a99b13c5550381e378c8c330793e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0120933550ea729b9f3186c3772531b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d0bdf7ecd1cdeaae44822635eb5e772f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38f3b85005a6612c7d00466cf164a742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d75831947a5e11c2b1baf10c08e3b39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9453f91bc00fd23b70e310baa04cbe71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2b6792eb0c4d5d6c04b426b1c98b3400 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-2003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02579
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-267
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-205 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7783
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7789
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7813 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-267
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0328
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-109 |
| filingDate |
2009-01-08^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-02^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b52fc377620c38fbf1b62c70c1d8bee5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32ad54e26b7e6499edd56c490997ca36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_afd1dd62d7adcdb433b25b6e27583625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a62aa7a45ab852cb651beb85a681bfdd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f016ce2246d825543cbffc0dd53a0851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d2fb116aab975b089762b05982a3250
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43a3c9414b60448ba63e458cf97329e7 |
| publicationDate |
2015-06-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9048302-B2 |
| titleOfInvention |
Field effect transistor having semiconductor operating layer formed with an inclined side wall |
| abstract |
A field effect transistor has an MOS structure and is formed of a nitride based compound semiconductor. The field effect transistor includes a substrate; a semiconductor operating layer having a recess and formed on the substrate; an insulating layer formed on the semiconductor operating layer including the recess; a gate electrode formed on the insulating layer at the recess; and a source electrode and a drain electrode formed on the semiconductor operating layer with the recess in between and electrically connected to the semiconductor operating layer. The recess includes a side wall inclined relative to the semiconductor operating layer. |
| priorityDate |
2008-01-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |