http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9164276-B2
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-02 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-02 |
filingDate | 2013-06-07^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2015-10-20^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa62803341ede83a6eb4723fe244c211 |
publicationDate | 2015-10-20^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-9164276-B2 |
titleOfInvention | Micro optical switching device, image display apparatus including micro optical switching device, and method of manufacturing micro optical switching device |
abstract | A micro optical switching device is provided, including a substrate, a first electrode disposed on a first surface of the substrate and including a first opening array including having a first plurality of openings, a second electrode disposed over the first electrode and including a second opening array including a plurality of second openings which do not overlap with the plurality of first openings, and a support member disposed on the substrate. The support member has a thickness greater than a distance from the first surface of the substrate to the second electrode and protrudes above the second electrode. |
priorityDate | 2012-06-07^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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