http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9164276-B2

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-02
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-02
filingDate 2013-06-07^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-10-20^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa62803341ede83a6eb4723fe244c211
publicationDate 2015-10-20^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9164276-B2
titleOfInvention Micro optical switching device, image display apparatus including micro optical switching device, and method of manufacturing micro optical switching device
abstract A micro optical switching device is provided, including a substrate, a first electrode disposed on a first surface of the substrate and including a first opening array including having a first plurality of openings, a second electrode disposed over the first electrode and including a second opening array including a plurality of second openings which do not overlap with the plurality of first openings, and a support member disposed on the substrate. The support member has a thickness greater than a distance from the first surface of the substrate to the second electrode and protrudes above the second electrode.
priorityDate 2012-06-07^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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