| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f47985b7c371b565f319708450999686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7cab5948791323c71ccd302adce10bb3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0191
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2201-003 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0018 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R17-02 |
| filingDate |
2015-04-13^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-07-05^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9376b361f2149d4b9393cf558c0db497
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1051bae2470a8ed88c0aa222a6fd048 |
| publicationDate |
2016-07-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9386379-B2 |
| titleOfInvention |
MEMS microphone |
| abstract |
Mechanical resonating structures, as well as related devices and methods of manufacture. The mechanical resonating structures can be microphones, each including a diaphragm and a piezoelectric stack. The diaphragm can have one or more openings formed therethrough to enable the determination of an acoustic pressure being applied to the diaphragm through signals emitted by the piezoelectric stack. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11533567-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11350218-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11606646-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3557881-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10623866-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11051113-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/IT-201800004758-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11553280-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10825982-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11350219-B2 |
| priorityDate |
2012-09-25^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |