http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9454079-B2

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filingDate 2014-05-07^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2016-09-27^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fc873c420032407403583685751ea8e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80acf29d41c626f58bbf03ec09fe213a
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ab9fd0e67049447b5c4db1f50f5e898
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6b1ce8b70344b786de459f885b818a6
publicationDate 2016-09-27^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9454079-B2
titleOfInvention Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern
abstract According to one embodiment, there is provided an actinic ray- or radiation-sensitive resin composition includingn (A) a compound represented by a general formula (1) below that generates an acid when exposed to actinic rays or radiation, and (B) a resin.
priorityDate 2011-11-07^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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