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publicationNumber US-9455391-B1
titleOfInvention Advanced process flow for quantum memory devices and josephson junctions with heterogeneous integration
abstract A process for constructing a superconducting Josephson-based nonvolatile quantum memory device comprising: sequentially depositing on a silicon substrate a thermal oxide buffer layer, a superconductor bottom-electrode thin film, and an oxide isolation layer; patterning an active window having dimensions smaller that 10 nanometers in the oxide isolation layer; then sequentially depositing a bottom tunnel oxide layer, a charge-trapping layer, a top cap, and a top superconductor electrode layer; defining an active region by dry etching down to the oxide isolation layer while protecting the active region from etch chemistry; depositing a device passivation layer; defining and patterning vias from a top of the device passivation layer to the superconductor bottom-electrode thin film and to the top superconductor electrode of the active region; and depositing metal interconnect into the vias.
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