| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d0a4be71831d9d4d07858332e609687c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ff80ef411e79c137eda9303dfb0ccf6d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_28a89f8dab024e02ae765d1273e716f1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2437
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00 |
| filingDate |
2012-12-14^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-10-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6188cd834c278250ffb3429d77218f70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb1880bdb6a85f84ba14a97719e4bf47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9c11906bfc58a780cbb630a98540c72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb87239e08525a81c1c146514c5b52bd |
| publicationDate |
2016-10-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9465012-B2 |
| titleOfInvention |
Measurement method using a sensor; sensor system and sensor |
| abstract |
Provided is a method for measurement of a change in environment at a sensor. The sensor has: a first layer formed of a piezoelectric material; a second layer formed adjacent the first layer and acoustically coupled with the first layer; and electrodes disposed to apply a driving signal to the first layer to generate bulk acoustic waves. The temperature coefficient of frequency of the first layer is different to that of the second layer. In the method, a first layer resonant frequency associated with the first layer and a combination resonant frequency associated with a combination of the first and second layers are detected. A shift in one or both of the first layer resonant frequency and the combination resonant frequency is detected. A portion of the shift caused by a temperature change at the sensor is identified. Another portion of the shift caused by an environmental change at the sensor other than the temperature change is identified. Also provided is a corresponding sensor and sensor system operable to carry out the method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11181508-B2 |
| priorityDate |
2011-12-15^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |