| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11524
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1157 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
2014-11-06^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-12-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_199477384251dab3b895cd8a4f1babab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b20df66d2e601622413f209a1b818282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1b4dd4b0ff637d623f3c87dea3d73ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e50762302bf669834ca9ee3dfb16ce61 |
| publicationDate |
2016-12-27^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9530683-B2 |
| titleOfInvention |
Forming source/drain zones with a dielectric plug over an isolation region between active regions |
| abstract |
An embodiment includes forming an isolation region between first and second active regions in a semiconductor, forming an opening between the first and second active regions by removing a portion of the isolation region, and forming a dielectric plug within the opening so that the dielectric plug is between the first and second active regions and so that a portion of the dielectric plug extends below upper surfaces of the first and second active regions. The dielectric plug may be formed of a dielectric material having a lower removal rate than a dielectric material of the isolation region for a particular isotropic removal chemistry. |
| priorityDate |
2012-01-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |