| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7813
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66734
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42364
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0465
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-049 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-04 |
| filingDate |
2014-12-11^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-02-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a5a086a96f70a911a4e7926d10a898d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2812618f3b97bb4fdf230c45f03bf57e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dee71b217f7d178cac2515cc1b34779
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_337e5e3ca6f66d1917161bdaf4e1d3c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c42a9f846938b5e2255a6eae63d41939
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d909e356a28d754fec1bb7160325ddbb |
| publicationDate |
2017-02-21^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9577073-B2 |
| titleOfInvention |
Method of forming a silicon-carbide device with a shielded gate |
| abstract |
A silicon-carbide semiconductor substrate having a plurality of first doped regions being laterally spaced apart from one another and beneath a main surface, and a second doped region extending from the main surface to a third doped region that is above the first doped regions is formed. Fourth doped regions extending from the main surface to the first doped regions are formed. A gate trench having a bottom that is arranged over a portion of one of the first doped regions is formed. A high-temperature step is applied to the substrate so as to realign silicon-carbide atoms along sidewalls of the trench and form rounded corners in the gate trench. A surface layer that forms along the sidewalls of the gate trench during the high-temperature step from the substrate is removed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10700192-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714609-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10985248-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11101343-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9837527-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11462611-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10872974-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10586845-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11189709-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10950696-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11011606-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11600701-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016163852-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10896952-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734483-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10903322-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742391-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626477-B2 |
| priorityDate |
2014-12-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |