http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9588073-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-121 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate | 2013-12-16^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-03-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69e8bbe11894ceb709e7534b95807479 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bc9458dedd474d0c0d32ac54b525533 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4db7411e5a0eed715a483e5f52e265c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b8f4b3225125f2cfa936eb24b174ccf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbda43f4b0fb77f16dccea87f8d39b0e |
| publicationDate | 2017-03-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9588073-B2 |
| titleOfInvention | Resistive MEMS humidity sensor |
| abstract | A semiconductor device includes a substrate, an insulating film provided on a surface of the substrate, and a sensing film formed of a conductive material deposited on top of the insulating film. The sensing film defines at least one conductive path between a first position and a second position on the insulating film. A first circuit connection is electrically connected to the sensing film at the first position on the insulating layer, and a second circuit connection is electrically connected to the sensing film at the second position. A control circuit is operatively connected to the first circuit connection and the second circuit connection for measuring an electrical resistance of the sensing film. The sensing film has a thickness that enables a resistivity of the sensing film to be altered predictably in a manner that is dependent on ambient moisture content. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022178862-A1 |
| priorityDate | 2012-12-19^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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