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filingDate 2015-01-21^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-04-04^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2a9aacf507db12b95a8f92ddad3e63f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
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publicationDate 2017-04-04^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9612533-B2
titleOfInvention Salt and photoresist composition comprising the same
abstract A salt which generates an acid by light irradiation, said salt comprising: n an acid-labile group having an acetal structure from which group a moiety having a fluorine-containing base-labile group is removed by bring into contact with the acid.
priorityDate 2014-01-24^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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