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filingDate 2015-09-04^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2017-05-09^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9646988-B2
titleOfInvention Semiconductor memory device and method for manufacturing same
abstract According to one embodiment, a semiconductor memory device includes a substrate; a stacked body provided on the substrate, the stacked body including a plurality of electrode layers and a first step portion, the first step portion having the plurality of electrode layers provided stepwise; a column provided in a region of the stacked body other than a region in the first step portion provided; and a plurality of insulating portions provided in the first step portion. The stacked body includes a metal silicide portion provided between the plurality of insulating portions and the plurality of electrode layers, a plurality of terraces provided on a top surface of each of the plurality of electrode layers of the first step portion, and a plurality of contact portions provided on the plurality of terraces.
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