Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-097 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00277 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0035 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00 |
filingDate |
2015-02-04^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2017-08-08^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8ce304b487a74ddcdf5e8b1c66fdcc7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4214724dfb7e52a73b23039c30c0e56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8de2cd11183c1af0c70c1c34ee72eca0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b873abe11711f42f21961bc72e284c10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dad638b2e19516c617c45a3a22fa01fb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4da75f3bf0dd40715c3373cf2da85348 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa38a158a4a13094fda16d21699b2bc4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9449680a572922c3df40f42b7433d525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e8396ff12eb3fa6ac90c2f4a382af69 |
publicationDate |
2017-08-08^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9725311-B2 |
titleOfInvention |
Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting |
abstract |
A micromechanical component includes: a hermetically sealed housing; a first functional element that is situated inside the housing; a first structured electrically conductive layer that contacts the first functional element and that is situated inside the housing; and a second structured electrically conductive layer, the first conductive layer being electrically contacted via the second conductive layer, and the second conductive layer being electrically contacted laterally through the housing via a hermetic through-contacting in the second conductive layer. |
priorityDate |
2014-02-17^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |