| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76876
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53209 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
| filingDate |
2015-10-01^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-08-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7751e1efbaaa8290e750b3408b28e133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90d4c438f3eedae2c2965b9bb79566a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_579836514b5e54731fe6736ac9b123cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eae096318a603d460f40e46b8725ab8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c7945f72c7deab7e75688025e6de64e |
| publicationDate |
2017-08-29^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9748137-B2 |
| titleOfInvention |
Method for void-free cobalt gap fill |
| abstract |
Provided herein are methods of depositing void-free cobalt into features with high aspect ratios. Methods involve (a) partially filling a feature with cobalt, (b) exposing the feature to a plasma generated from nitrogen-containing gas to selectively inhibit cobalt nucleation on surfaces near or at the top of the feature, optionally repeating (a) and (b), and depositing bulk cobalt into the feature by chemical vapor deposition. Methods may also involve exposing a feature including a barrier layer to a plasma generated from nitrogen-containing gas to selectively inhibit cobalt nucleation. The methods may be performed at low temperatures less than about 400° C. using cobalt-containing precursors. Methods may also involve using a remote plasma source to generate the nitrogen-based plasma. Methods also involve annealing the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11075115-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10916434-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10242879-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10211099-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11171141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11355345-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11621266-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580654-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10573522-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10381266-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10103058-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10170320-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9997405-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580695-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11410883-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10199235-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9899234-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10438847-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10256142-B2 |
| priorityDate |
2014-08-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |