| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1000c9e819bcdb940ee9c9d1bc86f355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3136c1892b988d99ee38fc35a81ed35 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02222 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 |
| filingDate |
2015-06-12^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-10-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_873f23c5f82e862a03b8c7994e14ed79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44ac09dab6a37a3f686e5e7a924b6679
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbb3fa93ef1ba1b0ee59f7573cffb965
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a5a9870e618bee848c7af15ed03edd3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cfada46bf51e83b3c2c088ab6de0ec5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12a5022b0e0374f2ee88fdf4b4ac6ed4 |
| publicationDate |
2017-10-03^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9777025-B2 |
| titleOfInvention |
Si-containing film forming precursors and methods of using the same |
| abstract |
Mono-substituted TSA precursor Si-containing film forming compositions are disclosed. The precursors have the formula: (SiH 3 ) 2 N—SiH 2 —X, wherein X is selected from a halogen atom; an isocyanato group; an amino group; an N-containing C 4 -C 10 saturated or unsaturated heterocycle; or an alkoxy group. Methods for forming the Si-containing film using the disclosed mono-substituted TSA precursor are also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10875877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10755921-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017338109-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11124876-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094532-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10106890-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10316407-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017271144-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11164776-B2 |
| priorityDate |
2015-03-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |