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filingDate 2016-04-19^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-11-14^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2017-11-14^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9819136-B2
titleOfInvention Gas mixture control in a gas discharge light source
abstract A gas discharge light source includes a gas discharge system that includes one or more gas discharge chambers. Each of the gas discharge chambers in the gas discharge system is filled with a respective gas mixture. For each gas discharge chamber, a pulsed energy is supplied to the respective gas mixture by activating its associated energy source to thereby produce a pulsed amplified light beam from the gas discharge chamber. One or more properties of the gas discharge system are determined. A gas maintenance scheme is selected from among a plurality of possible schemes based on the determined one or more properties of the gas discharge system. The selected gas maintenance scheme is applied to the gas discharge system. A gas maintenance scheme includes one or more parameters related to adding one or more supplemental gas mixtures to the gas discharge chambers of the gas discharge system.
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priorityDate 2016-01-08^^<http://www.w3.org/2001/XMLSchema#date>
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