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filingDate 2016-08-29^^<http://www.w3.org/2001/XMLSchema#date>
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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34b5125e3fad981c4c6dc7ec5d1434e9
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publicationDate 2018-02-13^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9893082-B2
titleOfInvention Semiconductor memory device and method of fabricating the same
abstract A semiconductor memory device includes a stack including gate electrodes and insulating layers that are alternately and repeatedly stacked on a substrate. A cell channel structure penetrates the stack. The cell channel structure includes a first semiconductor pattern contacting the substrate and a first channel pattern on the first semiconductor pattern. The first semiconductor pattern extends to a first height from a surface of the substrate to a top surface of the first semiconductor pattern. A dummy channel structure on the substrate and spaced apart from the stack. The dummy channel structure includes a second semiconductor pattern contacting the substrate and a second channel pattern on the second semiconductor pattern. The second semiconductor pattern extends to a second height from the surface of the substrate to a top surface of the second semiconductor pattern. The first height is greater than the second height.
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priorityDate 2015-01-30^^<http://www.w3.org/2001/XMLSchema#date>
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