Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42348 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11575 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11573 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11582 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-50 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11575 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11573 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11582 |
filingDate |
2016-08-29^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-02-13^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34b5125e3fad981c4c6dc7ec5d1434e9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99b81eb5461f0bb182e4558aacb55c86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32d4ce8b6326adde54956ac6a61c3710 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7f2e333ea97bd38b3546b510b0411f3 |
publicationDate |
2018-02-13^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9893082-B2 |
titleOfInvention |
Semiconductor memory device and method of fabricating the same |
abstract |
A semiconductor memory device includes a stack including gate electrodes and insulating layers that are alternately and repeatedly stacked on a substrate. A cell channel structure penetrates the stack. The cell channel structure includes a first semiconductor pattern contacting the substrate and a first channel pattern on the first semiconductor pattern. The first semiconductor pattern extends to a first height from a surface of the substrate to a top surface of the first semiconductor pattern. A dummy channel structure on the substrate and spaced apart from the stack. The dummy channel structure includes a second semiconductor pattern contacting the substrate and a second channel pattern on the second semiconductor pattern. The second semiconductor pattern extends to a second height from the surface of the substrate to a top surface of the second semiconductor pattern. The first height is greater than the second height. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10685695-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11411078-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019259439-A1 |
priorityDate |
2015-01-30^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |