| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c6dbdf2afd89ca15253d78365e0174b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c93e713822039ea64438481f1838f939
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_184ab6cc393cfc24516974b6d269f7e5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J31-1616
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02617
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02 |
| filingDate |
2014-09-19^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-03-20^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ee02a37218ae0233a4187dc781cd33d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_559143e6f997be6a2a3390ef24122f7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f1eb48abc0c3bf1a116bc3b7cf7ed7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b26447344b47ec168a832fc5e2c4d65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4fd1f40e1af349691aef89b83a94b80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea9835ab29916650b6ed6475daaac298 |
| publicationDate |
2018-03-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9920077-B2 |
| titleOfInvention |
Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereof |
| abstract |
Halogen free amine substituted trisilylamine and tridisilylamine compounds and a method of their preparation via de-hydrogenative coupling between the corresponding unsubstituted trisilylamines and amines catalyzed by transition metal catalysts is described. This new approach is based on the catalytic dehydrocoupling of a Si—H and a N—H moiety to form an Si—N containing compound and hydrogen gas. The process can be catalyzed by transition metal heterogenous catalysts such as Ru(0) on carbon, Pd(0) on MgO) as well as transition metal organometallic complexes that act as homogeneous catalysts. The —Si—N containing products are halide free. Such compounds can be useful for the deposition of thin films by chemical vapor deposition or atomic layer deposition of Si containing films. |
| priorityDate |
2013-09-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |