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filingDate 2016-09-15^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-04-24^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9954167-B2
titleOfInvention Memory device including a layer including hafnium oxide and method for manufacturing the same
abstract According to one embodiment, a memory device includes a first layer, a second layer, and a third layer provided between the first layer and the second layer. The first layer includes first interconnections and a first insulating portion. The first interconnections extend in a first direction. The first insulating portion is provided between the first interconnections. The second layer includes a plurality of second interconnections and a second insulating portion. The second interconnections extend in a second direction crossing the first direction. The second insulating portion is provided between the second interconnections. The third layer includes a ferroelectric portion and a paraelectric portion. The ferroelectric portion and the paraelectric portion include hafnium oxide.
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