| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_50d058fc441db0bf12f06052877d3e92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_79123a25478c2ce2d9fd74d2c4dd2bfb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2201-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-005 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R7-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-00 |
| filingDate |
2014-06-30^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-06-12^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ac926b5e4fdd1d9ae5af81400e09a79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d23201104fa72e23f787c447efb60294
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_127ef56aa9643566af04b347ddd04feb |
| publicationDate |
2018-06-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9994440-B2 |
| titleOfInvention |
MEMS device and process |
| abstract |
The application describes improvements to (MEMS) transducers ( 100 ) having a flexible membrane ( 301 ) with a membrane electrode ( 302 ), especially where the membrane is crystalline or polycrystalline and the membrane electrode is metal or a metal alloy. Such transducers may typically include a back-plate having at least one back-plate layer ( 304 ) coupled to a back-plate electrode ( 303 ), with a plurality of holes ( 314 ) in the back-plate electrode corresponding to a plurality back-plate holes ( 312 ) through the back-plate. In embodiments of the invention the membrane electrode has at least one opening ( 313 ) in the membrane electrode wherein, at least part of the area of the opening corresponds to the area of at least one back-plate hole, in a direction normal to the membrane, and there is no hole in the flexible membrane at said opening in the membrane electrode. There may be a plurality of such openings. The openings effectively allow a reduction in the amount of membrane electrode material, e.g. metal, that may undergo plastic deformation and permanently deform the membrane. The openings are at least partly aligned with the back-plate holes to minimize any loss of capacitance. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10972821-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021276857-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10993042-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11498830-B2 |
| priorityDate |
2013-07-05^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |