| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2002-03-14^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-02-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6342379f267837e4951da7476d052b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12e54befea21c905c0a5610502e28ff7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ce51c74bac8acbf1befc9d435ca3676 |
| publicationDate |
2006-02-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-RE38980-E |
| titleOfInvention |
Photoresist compositions |
| abstract |
The invention provides photoresist compositions comprising a resin binder having acid labile blocking groups requiring an activation energy in excess of 20 Kcal/mol. for deblocking, a photoacid generator capable of generating a halogenated sulfonic acid upon photolysis and optionally, a base additive. It has been found that linewidth variation is substantially reduced when using the halogenated sulfonic acid generator in a process involving a high temperature post exposure bake. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7482107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9140984-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006228647-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8614047-B2 |
| priorityDate |
1997-08-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |