| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_573ed0443947a43bf018a4ead7944a81 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C3-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C1-086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C1-003 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C3-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-91 |
| filingDate |
1999-12-23^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b68a0be3acbd98f91a360c073d309b0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b598b7399273ac7f0dca99ad7b0b6615 |
| publicationDate |
2001-04-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0125167-A1 |
| titleOfInvention |
Process for cleaning ceramic articles |
| abstract |
A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a strong acid and then using a pelletized CO2 cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6723437-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6565667-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9732420-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I512137-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0209161-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0209161-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014184043-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6296716-B1 |
| priorityDate |
1999-10-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |