| abstract |
A plasma processing container internal member excellent in chemical corrosion and plasma erosion resistance under an environment containing halogen gases, and an advantageous production method therefor, the member being formed by coating the front surface of a substrate by a multi-layer composite layer consisting of a metal coating formed as an under-coat, an Al2O3 coating formed as an intermediate layer on the under-coat, and a Y2O3 spray deposit formed as a top-coat on the intermediate layer. |