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publicationDate 2002-01-31^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-0208385-A1
titleOfInvention Novel strain for decomposing tmah, and method of wastewater treatment using the same
abstract The present invention describes a wastewater treatment method by a microorganism decomposing Tetramethyl Ammonium Hydroxide (TMAH) which, utilized in etching the surface of silicone chip in semiconductor manufacturing process, is toxic and hard to decomposed. The present invention provides novel microorganisms capable of decomposing TMAH. Also, the present invention provides a treatment methdo for wasterwater containing TMAH, using the microorganisms. The present invention is useful in industrial field as an environmental friendly wastewaster treatment method by decomposing over 90 % of TMAH, one of environmental contamimation materials in the wastewater of semiconductor factory.
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