patent/WO-2004114397-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004114397-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7317808024e524eea40a6c5a5ad6a22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d4fae5c85168f7f5f317eb845477cef6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_26775d868c0e9e5e9994f91f5e258e8b http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b599f8a2a2d0a80889b6be3f05080692 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20b102cd75dcae6d8936be945a40f184 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c96505b0540a73a5f9bc4563f553db8e
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-6666 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0557 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-6622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1431 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06548 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1434 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06572
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-90 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0805 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0657 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49838 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49827 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-486 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-945 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66181 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-0657 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49872
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-334 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
filingDate	2004-06-11^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88d86bc82e7a3b79e30fe574073de52f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b65b7475ea310c953672791d9b3b6131 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce494a5b81802db9cdc8da5218719b54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_082d1d5508c8f3572825a7bcd85df9c3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_650ecc1ee101b9160210fd446cf8d39c
publicationDate	2004-12-29^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	WO-2004114397-A1
titleOfInvention	Electronic device, assembly and methods of manufacturing an electronic device
abstract	A semiconductor substrate comprises both vertical interconnects and vertical capacitors with a common dielectric layer. The substrate can be suitably combined with further devices to form an assembly. The substrate can be made in etching treatments including a first step on the one side, and then a second step on the other side of the substrate.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112007000267-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7704881-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010500766-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9378967-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8653644-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9099296-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8680662-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8772908-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8283750-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008108970-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4585561-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009064820-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8085524-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3043381-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9847277-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8022527-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101423749-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8729665-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007054867-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8310036-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999810-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8076788-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7943473-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9620437-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8796828-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8871641-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8513789-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105097794-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9899353-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101356637-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8466542-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8637968-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7901989-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008139393-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11404534-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8809190-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007132423-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007131967-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005088699-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007132423-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8432045-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8735287-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8735205-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8193615-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10432172-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8736066-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8476774-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8610264-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009104132-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9368476-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9184469-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9224649-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112010000142-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7626257-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7944658-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8610259-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7952195-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8395914-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8704347-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9070678-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102272904-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9548254-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8405196-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8883562-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018062619-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8791575-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7829438-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8551815-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010083092-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8796135-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010505259-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8587126-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8461673-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8461672-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9048234-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10354942-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9362203-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015008296-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9355948-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008007257-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8513794-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008007257-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8310024-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8426957-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007082854-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012074570-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8431435-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8227847-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8043895-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8349654-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007054867-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8847380-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9269692-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9640437-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010531435-A
priorityDate	2003-06-20^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69667 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327157 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129389030 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098968 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425270609 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447

Showing number of triples: 1 to 159 of 159.