http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005064634-A1

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filingDate 2004-12-21^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d3d59521559386de6c3133fa889496e
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publicationDate 2005-07-14^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2005064634-A1
titleOfInvention Electronic apparatus with a micro-electromechanical switch made of a piezoelectric material
abstract An electronic apparatus contains a micro-electromechanical switch (MEMS) which comprises a piezoelectric element with a piezoelectric layer (12) between a first and a second electrode layers (11, 13), at least one of the electrode layers being structured into separate electrodes (41,42,43;51,52,53) that can be independently controlled.
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