http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005113376-A1

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publicationDate 2005-12-01^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2005113376-A1
titleOfInvention Getter deposition for vacuum packaging
abstract A device package (10) that includes a thin film getter (30) that is deposited on an inside surfaces of a device receiving vacuum sealed cavity or chamber (12, 14). The thin film getter is deposited using, for example, sputtering, resistive evaporation, e­-beam evaporation, or any other suitable deposition technique.
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