| abstract |
A micro-machined magnetic switch that operates under a magnetic force to close. A single-pole single-touch (SPST) implementation as well as a single-pole double-touch (SPDT) are shown. The micro-machined switch is designed to allow for enhanced magnetic flux, for achieving higher magnetic switching force, while maintaining the flexibility of the moving beam of the switch. In particular the moving beam provides for separate spring like action on one magnetic flux path and an additional, relatively significant, magnetic flux on another path, such that both of the fluxes contribute to the switching force. In one embodiment of the disclosed invention an oversized ferromagnetic magnetic flux collector(144), which is monolithically produced with a flexible beam (142) and is made by deposition of a ferromagnetic material, is used to direct the magnetic flux, for the purpose of providing sufficient force to enable the moving beam's motion for the purpose of closing an electrical path. |