| abstract |
A vapor-phase deposition method and apparatus for the application of layers and coatings useful in the fabrication of biotechnologically functional devices, Bio-MEMS devices, and in the fabrication of micro fluidic devices for biological applications. Oxide coatings providing hydrophilicity or oxide / polyethylene glycol coatings providing hydrophilicity can be deposited by the present method, over the interior surfaces of small wells in a plastic micro-plate or within the interior of lumens or other conduits in order to increase the hydrophilicity on the coated surface. |