| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a819eda0adf22936a52362eeebb9fb4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac219176f948ad0e29f6208b9e7a5773 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-17 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0218 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-02 |
| filingDate |
2005-06-28^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_706c13d2a9afa6c24a5df34c9c080e59 |
| publicationDate |
2008-05-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2007001294-A8 |
| titleOfInvention |
Method and apparatus for controlling nucleation in self-assembled films |
| abstract |
A method of forming a self-assembled film with periodic nanometer dimension features (e.g., holes) on a substrate includes the steps of providing film precursors on the substrate, wherein the film precursors are maintained in an amorphous state. Where the film precursors are block copolymers, a heating member is provided. The substrate and the heating member are then moved relative to one another so as to raise the temperature of a portion of the film precursor on the substrate above its glass transition temperature. Relative movement between the substrate and heating member continues until a self-assembled crystalline film is formed over the surface of the substrate. In an alternative embodiment, a pH dispensing member is provided to dispense a pH adjusting agent onto the substrate that promotes self-assembly of a crystalline film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8450418-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8753738-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8784974-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8669645-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8633112-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8512846-B2 |
| priorityDate |
2005-06-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |