| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_61943afeb5085c8be18492f8b43c78bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a7b097bfd3f350ed27ffa53e1f114d1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_df3dc27a648711017e207ce94b5924d0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03B21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0841 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-19 |
| filingDate |
2008-05-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0f0100363595f547ffab6308616e2c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dbddd640c817b61cb5ad14566584ecd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99bcf8bd80ca8079cdb56cbe903ffd67 |
| publicationDate |
2008-11-13^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008137113-A1 |
| titleOfInvention |
Mirror device with an anti-stiction layer |
| abstract |
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate. |
| priorityDate |
2007-05-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |