| abstract |
An imaging optical system has a plurality of mirrors, which image an object field (9) in an object plane (11) into an image field (13) in an image plane (14). A reflection face of at least one of the mirrors is configured as a free form face which cannot be described by a rotationally symmetrical function. The object field has an aspect ratio (x/y), which is greater than 1, a ratio of a minimal and a maximal transverse dimension of the object field being smaller than 0.9. In a further aspect, the object field (9) and/or the image field (13) deviate from a mirror-symmetrical field form. An illumination optical system (10) for illuminating the object field (9) has components guiding illumination light (3) which are designed to illuminate a correspondingly formed object field (9). The result is an imaging optical system, an illumination optical system and a projection exposure system equipped therewith, with which increased demands on the correction of imaging errors are taken into account over the field imaged by the imaging optical system. |