| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8263b00b52be79624d7129bcdf278af5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e592d6d6271ef1b638d4ed5e0533a1de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc8933d70ce61cff18389b355301acad |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01B1-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F23-10 |
| filingDate |
2011-09-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4d200b7b6642af4b4a992ae24058d64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c005b2c8b44b1caa59b7a2f1c525429 |
| publicationDate |
2012-07-26^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012098730-A1 |
| titleOfInvention |
Liquid vaporizer |
| abstract |
The invention provides a liquid vaporizer (100) that vaporizes a chemical solution supplied from a chemical solution supply port and mixes same into a gaseous medium. The liquid vaporizer (100) is provided with a main vaporizer body (110) having a mixed gas-generating space (116), and a vaporizing part (120) disposed inside the mixed gas-generating space (116). The vaporizing part (120) has a main vaporizing part body (121) whereon a vaporization surface (87) is formed and a reticular body (69) formed as a sheet by weaving wires evenly into a mesh. The reticular body (69) forms multiple mesh spaces that are spaces surrounded by the wires and are disposed in a regular pattern in the plane of the reticular body (69). The vaporizing part (120) forms multiple chemical solution-supplying spaces that are spaces surrounded by the wires and the vaporization surface (87) as a result of the reticular body (69) and the vaporization surface (87) contacting each other and that are disposed in a regular pattern in the plane of the reticular body (69). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013193230-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9266130-B2 |
| priorityDate |
2011-01-19^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |