http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012135286-A2

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filingDate 2012-03-28^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2012-10-04^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2012135286-A2
titleOfInvention Stabilized acid amplifiers
abstract There are disclosed sulfonic acid precursor compositions, as are methods of using these compositions in, for example, photolithography. Other embodiments are also disclosed.
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