http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013050417-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-085 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0658 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N25-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate | 2012-10-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e27059c2c06f74d364daf00dde0cdf8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cbd0bc474ef27b0dd08498c38f55664 |
| publicationDate | 2013-04-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2013050417-A1 |
| titleOfInvention | Contactless method for determining the thickness of a sample, corresponding system |
| abstract | The invention relates to a method for measuring a Δ thickness of a sample (1), characterized in that said method comprises the steps according to which - a source (2) of a heat radiation beam (20) excites (S1) the sample (1) in a periodic fashion at a frequency (f), thereby causing the sample (1) to undergo periodic thermal excitation; - a sensor (3) measures (S2) a periodic thermal response on the part of the sample, in response to the periodic thermal excitation; - a processor (4) determines (S3) a phase shift (φ) between the periodic thermal excitation and the periodic thermal response; wherein the source (2) excites the sample for a plurality of frequencies (f) and wherein the processor (4) determines a phase shift for each frequency (f), thereby determining a plurality of phase shifts (φ); - the processor (4) - determines (S4) a minimum phase shift φmin (φ) by using the plurality of phase shifts determined in said manner, and - determines (S5) the Δ thickness of the sample (1) using the following formula: Δ = r 0 *g(φmin) where r 0 is the heat radiation beam ray, and g is a function that depends on the type of heat radiation beam (20). The invention also relates to a system for implementing the method. |
| priorityDate | 2011-10-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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