| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62c1296b16072a8c460758fdc9a9fa2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8bab545eb892aa53261c8dd51d31ffb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6274ce7dabfaf7f961550410914823f6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-30415
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-3048 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-3044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G08B17-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J33-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J33-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G08B17-11 |
| filingDate |
2012-12-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d1d78c7de720c6205f5704e248d2a02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6af9ea24cbaa799e4d8b5f46475da0d |
| publicationDate |
2013-07-04^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013101716-A1 |
| titleOfInvention |
Two-wafer mems ionization device |
| abstract |
A micro-electromechanical system (MEMS) assembly includes at least one emission source; a top wafer having a plurality of side walls and a generally horizontal portion, the horizontal portion having a thickness between a first side and a directly opposed second side, at least one window in the horizontal portion extending between the first and second sides and a transmission membrane across the at least one window; and a bottom wafer having a first portion with a first substantially planar surface, an intermediate surface directly opposed to the first substantially planar surface, a second portion with a second substantially planar surface, the at least one emission source provided on the second substantially planar surface; where the top wafer bonds to the bottom wafer at the intermediate surface and encloses a cavity within the top wafer and the bottom wafer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9640514-B1 |
| priorityDate |
2011-12-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |