Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b367a7fe453ac8c9606a68f8e62f1226 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_763d3f365eb97a4c5c04238413cbc86e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f97f0fa258a008bf056ad04b7f380dda http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ea7cc5d28840608f523eab9fa9d7f95 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2030-647 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-64 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-68 |
filingDate |
2012-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccd5ab77a33203548567a2a5e3152034 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a67b3593e1a94669ac0e08711a43585 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31ea5b50dc6b12803755ee5e7a703cc4 |
publicationDate |
2013-09-19^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2013136482-A1 |
titleOfInvention |
Discharge ionization current detector and method for aging treatment of same |
abstract |
An aging treatment is carried out using a cleaning gas prepared by mixing a plasma gas with an inert gas that serves as an impurity. A high-voltage alternating-current voltage is applied to an electrode (6) while supplying the cleaning gas from a gas inlet (12)into a dielectric tube (4) to perform the generation of plasma by means of dielectric barrier discharge until a predetermined time is elapsed. Thereafter, the gas to be supplied from the gas inlet (12) is switched to a plasma gas, the application of the high-voltage alternating-current voltage to the electrode (6) is continued, the generation of plasma by means of discharge is continued until an output signal from a current amplifier (28) can be stabilized, and the cleaning gas in the dielectric tube (4) and a tube (5) is replaced by the plasma gas completely. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019023581-A |
priorityDate |
2012-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |