http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013136482-A1

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publicationDate 2013-09-19^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2013136482-A1
titleOfInvention Discharge ionization current detector and method for aging treatment of same
abstract An aging treatment is carried out using a cleaning gas prepared by mixing a plasma gas with an inert gas that serves as an impurity. A high-voltage alternating-current voltage is applied to an electrode (6) while supplying the cleaning gas from a gas inlet (12)into a dielectric tube (4) to perform the generation of plasma by means of dielectric barrier discharge until a predetermined time is elapsed. Thereafter, the gas to be supplied from the gas inlet (12) is switched to a plasma gas, the application of the high-voltage alternating-current voltage to the electrode (6) is continued, the generation of plasma by means of discharge is continued until an output signal from a current amplifier (28) can be stabilized, and the cleaning gas in the dielectric tube (4) and a tube (5) is replaced by the plasma gas completely.
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