| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_572e1b5ba83c6926c06172e4e4804c9b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5eea28d1070b72554b26e722ec34bcf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2f2c5972365172d35633c3e715a4137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8623153cb833a8c638eb94506baf804e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49155 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F15-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-6845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-56 |
| filingDate |
2013-04-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_238d4c7e88da05e2c0ec57eec1cef27d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_688e1441e5e20728b094a414509d21e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b61701e23fc5eaf4e00fcd24b0e85f31 |
| publicationDate |
2014-01-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2014011277-A2 |
| titleOfInvention |
Gaseous flow sensor and related method thereof |
| abstract |
A gas flow sensing device, and related method of manufacturing, comprising a conductive layer encapsulated in dielectric film, suspended over a cavity to form a diaphragm. The conductive layer functions as both a heating a sensing element and is patterned to provide uniform heat distribution across the diaphragm. The device is designed to sense flow from any direction relative to the device and the design of the dielectric film and diaphragm reduces sensor drift during prolonged operation. |
| priorityDate |
2012-04-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |